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SM ISO690:2012 SYRBU, Alexei, MEREUTZA, Alexandru, SURUCEANU, Grigore, YAKOVLEV, Vladimir, CALIMAN, Andrei, VIERU, Stanislav. AlGaAs native oxides in the fabrication of high performance laser diodes. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 18, 11-14 octombrie 1995, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 1995, pp. 289-292. DOI: https://doi.org/10.1109/SMICND.1995.494918 |
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Proceedings of the International Semiconductor Conference 1995 | ||||||
Conferința "International Semiconductor Conference" 18, Sinaia, Romania, 11-14 octombrie 1995 | ||||||
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DOI:https://doi.org/10.1109/SMICND.1995.494918 | ||||||
Pag. 289-292 | ||||||
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Some results on AlGaAs native oxides growth and their application in the fabrication of high performance laser diodes are presented. These native oxides have been used extensively in the formation of laser diodes with the active layer width of the order of 1 μm as well as for decreasing the laser diode mirrors reflectivity in the interval from 0.33 to 0.02. |
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Cuvinte-cheie oxides, Semiconducting gallium arsenide, Semiconductor device manufacture, Semiconductor growth, Semiconductor lasers |
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