 |
 235 0 |
 SM ISO690:2012TIGINYANU, Ion, URSAKI, Veaceslav, POPA, Veaceslav. Nanoimprint lithography (NIL) and related techniques for electronics applications. Kidlington: 2011, pp. 280-329. ISBN 978-184569812-6DOI: 10.1533/9780857094902.2.280 |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
 Nanocoatings and Ultra-Thin Films: Technologies and Applications | ||||||
| 2011 / ISBN 978-184569812-6 | ||||||
|
||||||
| DOI:https://doi.org/10.1533/9780857094902.2.280 | ||||||
| Pag. 280-329 | ||||||
|
||||||
 Descarcă PDF |
||||||
| Rezumat | ||||||
This chapter provides a review of nanoimprint lithography techniques, highlighting their potential to surpass photolithography in resolution, and, at the same time, to allow mass fabrication at a lower cost. The current and potential uses of nanoimprint lithography are discussed in fields such as data storage, optical components, image sensors, and phase change random access memory devices. Challenges faced by nanoimprint lithography in becoming a standard fabrication technique are considered in connection with recent technology developments to extend existing optical lithography processes for semiconductor fabrication. |
||||||
| Cuvinte-cheie mold, Nanofabrication, Nanoimprint, patterning, Polymer resist, Soft lithography, Thermal imprint, Thermoplastic |
||||||
|
Google Scholar Export
<meta name="citation_title" content="Nanoimprint lithography (NIL) and related techniques for electronics applications"> <meta name="citation_author" content="Tiginyanu Ion"> <meta name="citation_author" content="Ursaki Veaceslav"> <meta name="citation_author" content="Popa Veaceslav"> <meta name="citation_publication_date" content="2011/01/04"> <meta name="citation_journal_title" content="Revista ştiinţifico-practică ”Info-Med” "> <meta name="citation_volume" content="17"> <meta name="citation_issue" content="1"> <meta name="citation_firstpage" content="280"> <meta name="citation_lastpage" content="329"> <meta name="citation_pdf_url" content="https://ibn.idsi.md/sites/default/files/imag_file/tiginyanu_2011.pdf">
ISBN: 978-184569812-6
DOI: 10.1533/9780857094902.2.280
Domenii științifice:
Alte contribuții (capitole, secțiuni ale cărții / culegerii) disponibile în IBN
| Introduction | 15-20 | |
| Ultra-thin membranes for sensor applications | 330-354 |
|
|
|
