Study on the manufacture technology of GaP-SnO2 structures for ultraviolet radiation sensors
Închide
Articolul precedent
Articolul urmator
110 0
SM ISO690:2012
DOROGAN, Valerian, IVASHCHENCO, Anatolii, SNIGUR, Anatolii, SHCHUROVA, Olga, VIERU, Tatiana. Study on the manufacture technology of GaP-SnO2 structures for ultraviolet radiation sensors. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 18, 11-14 octombrie 1995, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 1995, pp. 469-472. DOI: https://doi.org/10.1109/SMICND.1995.495062
EXPORT metadate:
Google Scholar
Crossref
CERIF

DataCite
Dublin Core
Proceedings of the International Semiconductor Conference 1995
Conferința "International Semiconductor Conference"
18, Sinaia, Romania, 11-14 octombrie 1995

Study on the manufacture technology of GaP-SnO2 structures for ultraviolet radiation sensors

DOI:https://doi.org/10.1109/SMICND.1995.495062

Pag. 469-472

Dorogan Valerian, Ivashchenco Anatolii, Snigur Anatolii, Shchurova Olga, Vieru Tatiana
 
Technical University of Moldova
 
 
Disponibil în IBN: 7 decembrie 2023


Rezumat

The manufacture technology of GaP-SnO2 structures for UV-radiation sensors producing is described in this article. The used technological methods are: liquid-phase GaP epitaxial growth and dichlorobis(athetilacetonat)tin(IV) vapor pyrolyze for SnO2 deposition. The doping with rare earth elements Er and Y was used for obtaining the necessary free charge carrier concentration in GaP epitaxial layers.

Cuvinte-cheie
Carrier concentration, charge carriers, Epitaxial growth, Optical sensors, pyrolysis, Semiconducting gallium compounds, Semiconductor device manufacture, Ultraviolet radiation

DataCite XML Export

<?xml version='1.0' encoding='utf-8'?>
<resource xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns='http://datacite.org/schema/kernel-3' xsi:schemaLocation='http://datacite.org/schema/kernel-3 http://schema.datacite.org/meta/kernel-3/metadata.xsd'>
<identifier identifierType='DOI'>10.1109/SMICND.1995</identifier>
<creators>
<creator>
<creatorName>Dorogan, V.V.</creatorName>
<affiliation>Universitatea Tehnică a Moldovei, Moldova, Republica</affiliation>
</creator>
<creator>
<creatorName>Ivashchenco, A.I.</creatorName>
<affiliation>Universitatea Tehnică a Moldovei, Moldova, Republica</affiliation>
</creator>
<creator>
<creatorName>Snigur, A.</creatorName>
<affiliation>Universitatea Tehnică a Moldovei, Moldova, Republica</affiliation>
</creator>
<creator>
<creatorName>Shchurova, O.</creatorName>
<affiliation>Universitatea Tehnică a Moldovei, Moldova, Republica</affiliation>
</creator>
<creator>
<creatorName>Vieru, T.S.</creatorName>
<affiliation>Universitatea Tehnică a Moldovei, Moldova, Republica</affiliation>
</creator>
</creators>
<titles>
<title xml:lang='en'>Study on the manufacture technology of GaP-SnO2 structures for ultraviolet radiation sensors</title>
</titles>
<publisher>Instrumentul Bibliometric National</publisher>
<publicationYear>1995</publicationYear>
<relatedIdentifier relatedIdentifierType='ISBN' relationType='IsPartOf'></relatedIdentifier>
<subjects>
<subject>Carrier concentration</subject>
<subject>charge carriers</subject>
<subject>Epitaxial growth</subject>
<subject>Optical sensors</subject>
<subject>pyrolysis</subject>
<subject>Semiconducting gallium compounds</subject>
<subject>Semiconductor device manufacture</subject>
<subject>Ultraviolet radiation</subject>
</subjects>
<dates>
<date dateType='Issued'>1995</date>
</dates>
<resourceType resourceTypeGeneral='Text'>Conference Paper</resourceType>
<descriptions>
<description xml:lang='en' descriptionType='Abstract'><p>The manufacture technology of GaP-SnO<sub>2</sub>&nbsp;structures for UV-radiation sensors producing is described in this article. The used technological methods are: liquid-phase GaP epitaxial growth and dichlorobis(athetilacetonat)tin(IV) vapor pyrolyze for SnO<sub>2</sub>&nbsp;deposition. The doping with rare earth elements Er and Y was used for obtaining the necessary free charge carrier concentration in GaP epitaxial layers.</p></description>
</descriptions>
<formats>
<format>application/pdf</format>
</formats>
</resource>