Binary superimposed gratings formed by e-beam recording in amorphous AsS films
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SERGEEV, Sergei, YOVU, M., ENACHI, Mihail. Binary superimposed gratings formed by e-beam recording in amorphous AsS films. In: Journal of Nanoelectronics and Optoelectronics, 2014, vol. 9, pp. 291-294. ISSN 1555-130X. DOI: https://doi.org/10.1166/jno.2014.1583
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Journal of Nanoelectronics and Optoelectronics
Volumul 9 / 2014 / ISSN 1555-130X

Binary superimposed gratings formed by e-beam recording in amorphous AsS films

DOI:https://doi.org/10.1166/jno.2014.1583
CZU: 621.38+538.9

Pag. 291-294

Sergeev Sergei1, Yovu M.1, Enachi Mihail2
 
1 Institute of Applied Physics, Academy of Sciences of Moldova,
2 National Center for Materials Study and Testing, Technical University of Moldova
 
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Disponibil în IBN: 28 august 2023


Rezumat

Binary unidirectional superimposed diffraction gratings with grating periods of 0.9 μm and 1 μm were formed in amorphous AsS films by e-beam recording. The influence of recording sequence of index superimposed gratings on their diffraction efficiency was evidenced. Enhancement of diffraction efficiencies of index superimposed gratings as compared to single gratings was revealed. Relief structures of superimposed gratings were fabricated by chemical etching. The surface relief modulation was studied by atomic force microscope. A beat period of 9 μm for relief complex structure was observed. The highest depth of relief modulation was about 70-80 μm

Cuvinte-cheie
diffraction efficiency, e-beam recording, Relief Structure, Superimposed Gratings