Yttria-stabilized zirconia (YSZ) layers are actively used as material of thermal barrier coatings (TBC). The increase of operating temperatures up to 2000 K in gas turbines of new generation leads to the stricter requirements to the TBC composition as well as to necessity of changing technological preparation method. Metal organic chemical vapor deposition (MOCVD) is considered as alternative perspective method for creating TBCs. From the point of successful MOCVD process, first of all the information on thermal properties of the metal precursors with organic ligands are needed. The objects of our investigation were yttrium(III) and zirconium(IV) dipivaloylmethanates and their mixtures. Thermal behavior in condensed phase was investigated by thermogravimetry, differential-thermal analysis and differential scanning calorimetry. Based on the information about thermodynamic characteristics of phase transitions, vapour pressures were measured for yttrium(III) and zirconium (IV) dipivaloylmethanates and for their equimolar mixture by static method with membrane quartzmanometer and transpiration method. As a result of searching new, perhaps, more appropriate MOCVD precursors yttrium(III) dipivaloylmethanate derivatives with tetramethylethylendiamine (tmeda), bipyridyl (bipy) and ethilendiamine were obtained and investigated by using TG/DTA and effusion method Knudsen with mass-spectrometric registration of the gas phase composition.