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 SM ISO690:2012IVASHCHENKO, Anatolii, KERNER, Iacov, MARONCHUK, Irina. Effect of substrate origin on stability of electrical conductivity of SnO2 thin polycrystalline films. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 23, 10-14 octombrie 2000, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2000, Vol. 1, pp. 139-142. DOI: https://doi.org/10.1109/SMICND.2000.890205 |
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 Proceedings of the International Semiconductor Conference Vol. 1, 2000 |
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Conferința "International Semiconductor Conference" 23, Sinaia, Romania, 10-14 octombrie 2000 | ||||||
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| DOI:https://doi.org/10.1109/SMICND.2000.890205 | ||||||
| Pag. 139-142 | ||||||
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The variation of electric conductivity induced by heat treatment in undoped SnO2 thin polycrystalline films deposited on three types of substrate was investigated. The effect of substrate origin on the stability of electric conductivity of the films was also discussed. Thickness of the film was determined using the optical interference method. |
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| Cuvinte-cheie Annealing, deposition, Electric conductivity, Light interference, Polycrystalline materials, Semiconducting tin compounds, Substrates |
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