Effect of substrate origin and annealing conditions on stability of electrical conductivity of SnO2 thin polycrystalline films
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IVASHCHENKO, Anatolii, KERNER, Iacov, MARONCHUK, Irina. Effect of substrate origin and annealing conditions on stability of electrical conductivity of SnO2 thin polycrystalline films. In: Proceedings of the International Semiconductor Conference: CAS, Ed. 24, 9-13 octombrie 2001, Sinaia. New Jersey: Institute of Electrical and Electronics Engineers Inc., 2001, Vol. 2, pp. 391-394.
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Proceedings of the International Semiconductor Conference
Vol. 2, 2001
Conferința "International Semiconductor Conference"
24, Sinaia, Romania, 9-13 octombrie 2001

Effect of substrate origin and annealing conditions on stability of electrical conductivity of SnO2 thin polycrystalline films


Pag. 391-394

Ivashchenko Anatolii, Kerner Iacov, Maronchuk Irina
 
Institute of Applied Physics, Academy of Sciences of Moldova
 
 
Disponibil în IBN: 29 noiembrie 2023


Rezumat

The variation of electrical conductivity in SnO2 thin films induced by their annealing in air or vacuum the temperature range from 380 to 750°C is considered. Substrate origin as well as ambient atmosphere of annealing plays principal role in stability of film properties.

Cuvinte-cheie
Annealing, crystal structure, deposition, Electric conductivity, oxygen, Polycrystalline materials, stability, Substrates, Thermal effects, thin films, X ray diffraction analysis