Electrical characterization and cathodoluminescence microanalysis of AlN/GaN heterostructures
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HUBBARD, Seth M., PAVLIDIS, Dimitris, VALIAEV, V., STEVENS-KALCEFF, Marion A., TIGINYANU, Ion. Electrical characterization and cathodoluminescence microanalysis of AlN/GaN heterostructures. In: Materials Science and Engineering B: Solid-State Materials for Advanced Technology, 2002, vol. 91-92, pp. 336-340. ISSN 0921-5107. DOI: https://doi.org/10.1016/S0921-5107(01)01045-5
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Materials Science and Engineering B: Solid-State Materials for Advanced Technology
Volumul 91-92 / 2002 / ISSN 0921-5107

Electrical characterization and cathodoluminescence microanalysis of AlN/GaN heterostructures

DOI:https://doi.org/10.1016/S0921-5107(01)01045-5

Pag. 336-340

Hubbard Seth M.1, Pavlidis Dimitris1, Valiaev V.1, Stevens-Kalceff Marion A.2, Tiginyanu Ion3
 
1 University of Michigan,
2 University of New South Wales,
3 Technical University of Moldova
 
 
Disponibil în IBN: 20 iunie 2023


Rezumat

Low-pressure MOCVD is used to grow AlN/GaN MIS-type heterostructures with AlN thickness between 3 and 35 nm. The two-dimensional electron gas (2DEG) Hall mobility was found to decrease with AlN thickness. The measured room temperature and 20 K mobilities for a sample with 15 nm thick AlN were 465 cm2V-1s-1 (ns = 1.72 × 1013 cm-2) and 877 cm2 V-1 s-1 (ns = 1.57 × 1013 cm-2), respectively. Cathodoluminescence (CL) spectra consist of two GaN-related bands with the maxima at 3.4 and 1.9-2.3 eV. Under surface excitation the intensity of the red-yellow CL relative to the intensity of the UV emission was found to increase with AlN film thickness. This increase was found to correlate with the decrease in 2DEG Hall mobility.

Cuvinte-cheie
Aluminum nitride, atomic force microscopy, cathodoluminescence, Gallium nitride, Metal-insulator-semiconductor structures