The optical interferometry measurement methods are based on phenomenon of interference of waves and possess unique potential capabilities in domain of precise measurements. So, when measuring linear sizes in microscopic areas they allow receiving digital information with the precision comparable with the length of light wave, or higher at computer image processing. A common interferometry measurement comprises the physical specimen under study itself, the optical setup forming interference pattern captured by CCD matrix and computer with software tools designed for interferograms processing. All these parts are combined today under the single generic term “imaging interferometry (interferometric imaging)”. Another, close to this term is “spectral imaging” implying the possibility to construct the spectral intensity curve from a single line width of a given fluorescent spectrum, captured by the CCD array.   Imaging technology is a non-destructive imaging technique that combines spatial and spectral information to provide a more complete characterization of a sample. Small changes in the optical paths differences between the two interfering beams can be detected by imaging methods, because these differences will produce noticeable changes in the interference pattern. Modern digital CCD or CMOS cameras embedded in optical circuits to record interferograms present big matrices of physical sensors. They have high sensitivity and power of spatial resolution and provide the opportunity of measuring simultaneously a range of points across the whole image of a given sample. The strict mathematical modeling and software tools used in this case give the opportunity to achieve the limiting (theoretical possible) values of measurements and thus, to obtain a more precise and detailed characterization of the specimen.   In this paper we analyze different mathematical approaches and algorithms for processing of interferograms stored in the most common units of optical interferometry measurements equipped by digital CCD camera. In detail are derived all necessary relations for numerical determining of the linear vertical and horizontal dimensions of micro objects, the refractive index of homogeneous materials, construction of intensity curve from image of material’s fluorescence spectrum. Measured parameters are expressed in terms of interference fringe pattern period and are functions of the optical setup geometry. Period dimension in pixels is determined upon lines of maxima and minima intensities, built with the help of mathematical approximation methods. The more pixels contained in the period, the greater is measurements accuracy achieved in the certain optical system. By controlling the angles of beams intersection we can extend in length their superposition area and, thus conduct remote measurements up to the length of laser coherence. Accuracy at this decreases with distance because the period of interference increases.   Presented in this paper methods and algorithms are practical and can be used to create computer software tools designed for interferograms processing and analysis with the purpose of retrieval the high precision quantitative information. As examples, in paper are presented two such tools. The first tool implements the path difference of two interfering beams performed by conventional Michelson interferometer equipped with a digital camera. This tool is intended for measurements of thickness and optical parameters of thin functional films commonly used in photonics. Reliable measurements of opaque film thickness with thickness much smaller than the wavelength of light (up to 20-30 nm) are possible by this equipment. The second tool is intended for measurements of horizontal sizes of objects by processing their images superimposed with an interference pattern with known period. The measurement accuracy is also determined by the number of pixels in a pattern period.