Interferometric method application for sub-micrometers thickness measurements of spin-coated PEPC and PETPC polymer films
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MESHALKIN, Alexei, ANDRIESH, Andrei, AKIMOVA, Elena, BETS , Ludmila, ANDRIESH, Ion, DRAHNEA, Serghei. Interferometric method application for sub-micrometers thickness measurements of spin-coated PEPC and PETPC polymer films. In: Nanotechnologies and Biomedical Engineering, Ed. 1, 7-8 iulie 2011, Chișinău. Technical University of Moldova, 2011, Editia 1, pp. 194-197. ISBN 978-9975-66-239-0..
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Nanotechnologies and Biomedical Engineering
Editia 1, 2011
Conferința "International Conference on Nanotechnologies and Biomedical Engineering"
1, Chișinău, Moldova, 7-8 iulie 2011

Interferometric method application for sub-micrometers thickness measurements of spin-coated PEPC and PETPC polymer films


Pag. 194-197

Meshalkin Alexei1, Andriesh Andrei1, Akimova Elena1, Bets Ludmila2, Andriesh Ion3, Drahnea Serghei3
 
1 Institute of Applied Physics, Academy of Sciences of Moldova,
2 Institute of Chemistry of the Academy of Sciences of Moldova,
3 Moldova State University
 
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Disponibil în IBN: 22 iulie 2019


Rezumat

This paper deals with the interferometric thickness measurements of spin-coated thin polymer films. Spin coating is currently the predominant technique employed to produce uniform thin films of polymers in sub-micrometer range. But the thickness measurement of such thin films requires the application of high precision methods. In the paper we design and develop the system based on the common interferometer MII-4 and digital camera for measurement of the thin PEPC and PETPC polymer films. Different concentration of polymer solution and spin speed were used in order to obtain thin films with variable thickness (from 100 nm to 1000 nm) by spin coating technique.

Cuvinte-cheie
thin polymer layers, spin-coating, interferometric thickness measurements