Computer- assisted electron beam recording of patterns in AsS films
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ABASHKIN, Vladimir, AKIMOVA, Elena, SERGEEV, Sergei, PRISAKAR, Alexandr. Computer- assisted electron beam recording of patterns in AsS films. In: Nanotechnologies and Biomedical Engineering, Ed. 2, 18-20 aprilie 2013, Chișinău. Technical University of Moldova, 2013, Editia 2, pp. 89-92. ISBN 978-9975-62-343-8..
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Nanotechnologies and Biomedical Engineering
Editia 2, 2013
Conferința "International Conference on Nanotechnologies and Biomedical Engineering"
2, Chișinău, Moldova, 18-20 aprilie 2013

Computer- assisted electron beam recording of patterns in AsS films


Pag. 89-92

Abashkin Vladimir, Akimova Elena, Sergeev Sergei, Prisakar Alexandr
 
Institute of Applied Physics, Academy of Sciences of Moldova
 
Proiecte:
 
Disponibil în IBN: 14 iunie 2019


Rezumat

In this paper, we present the PC-assisted e-beam recording of some diffraction structures in As2S3 thin films with thickness about 1 μm. The square surfaces occupied by holograms on the film were from 400 x 400 μm2 up to 1600 x 1600 μm2. The diffraction gratings mosaic of different configurations were recorded in the vector mode. The raster mode of recording have been used for microimages and digital holograms presented in .bmp format. Digital hologram of cube image was reconstructed by He-Ne laser beam (wavelength 0.633 μm) in transmission mode and investigated. The diffractive characteristics of the designed diffraction structures and images were studied. Some multibeams diffraction and their optical properties are experimentally studied.

Cuvinte-cheie
As2S3 thin films, computer-aided recording, diffraction elements, e-beam recording