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SM ISO690:2012 RYMUZA, Z., EKWINSKI, G.. New method of calibration of AFM cantilevers and nanoindenter transducers applied in nanomechanical and nanotribological studies of nanomaterials and micro/nanostructures. In: Materials Science and Condensed Matter Physics, Ed. 7, 16-19 septembrie 2014, Chișinău. Chișinău, Republica Moldova: Institutul de Fizică Aplicată, 2014, Editia 7, p. 210. |
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Materials Science and Condensed Matter Physics Editia 7, 2014 |
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Conferința "Materials Science and Condensed Matter Physics" 7, Chișinău, Moldova, 16-19 septembrie 2014 | ||||||
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Pag. 210-210 | ||||||
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The problem of calibration of Atomic Force Microscope (AFM) cantilevers and nanoindenter transducers is quite sophisticated area of the research. The commercially available AFM cantilevers have not precise description of the force constant (stiffness) which is crucial information for the quantitative studies in the area of nanomechanics and nanotribology. There are many complicated methods proposed to identify the metrological properties of the used AFM [1-3]. These methods are not assuring the calibration of the cantilever probe with enough accuracy, are time consuming and sometimes are conducting to destruction of the cantilever. Our aim was to elaborate new accurate method of calibration, enough simple, easy to be applied in the laboratory or industrial environment and at low cost. We invented, tested and finely fabricated special calibration membrane structures which are optimized to be used by even not experienced researcher. The short path of the search for the aforementioned method will be presented with the presentation of the performed design, optimization and fabrication as well as calibration of fabricated the membrane structures. The procedure of the calibration of AFM cantilevers and nanoindenter transducers in the practice of nanomechanical and nanotribological studies of nanomaterials and micro/nanostructures like MEMS/NEMS components will be presented and discussed in details. |
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