The largest global challenge at the present time is to replace fossil fuel and nuclear energy with energy from renewable resources. As solar energy is the most abundant and free energy source on earth, converting sunlight to usable forms of energy like electricity and heat becomes more and more important. Semiconductor based devices that convert sunlight directly into electricity are commonly known as solar cells. Crystalline silicon solar cells are market dominating technology with record efficiencies currently at 26.6% w hich is close to the theoretical maximum efficiency. In order to surpass the efficiency limitation at reasonable cost the combination of silicon cells with a low cost cell technology using a different absorber material that possesses a reasonable bang gap to build tandem solar cells is the next focus. Inspired by the photosynthetic process, a low cost solar cell technology known as dye-sensitized solar cells, which converts sunlight to electricity, was developed [1]. In 2009, another more efficient solar cell technology was discovered, known as perovskite solar cells, which uses organic-inorganic halide perovskite (CH3NH3PbI3) materials as light absorbing layers. Within just a few years, the power conversion efficiencies of these solar cells improved significantly from 3.8% to 22.7%, becoming in efficiencies comparable to commercial silicon based solar cells.[2, 3] This outstanding performance coming as a result of the exceptional properties of perovskites has made them appealing candidates for low-cost high efficiency solar cells. They are regarded as a star in the photovoltaic world and attract huge interest from the academic and industrial community in special for tandem solar cell applications.  High quality CH3NH3PbI3 absorbers can be obtained using several methods and applying wet or dry processes. Vacuum evaporation has been demonstrated as an efficient method to fabricate uniform and pin-hole-free films with complete coverage. This technique does not require strong solvents such as DMF or DMSO. Also, this is the ideal method for the preparation of high quality CH3NH3PbI3 films in different stacks, on different types of substrates with surfaces of different wettability and potentially for better interfacial contacts. We constructed a planar device in n-i-p structure with TiO2 as the electron and spiro-OMeTAD as the hole transport layer. The thickness of TiO2 is 30 nm prepared by evaporation process. Subsequently, a 15 nm PCBM layer was spin-coated on top of the TiO2. The deposition of the perovskite absorber was performed in a vacuum system by thermal co-evaporation of PbI2 and CH3NH3I, the final thickness amounts to ~400 nm. After the deposition of the perovskite film a ~180 nm spiro-OMeTAD layer was spin-coated on top of the device. Finally, to assemble the perovskite solar cells, a 80 nm gold counter electrode was deposited by thermal evaporation. The data of our experiments shows that co-evaporated CH3NH3PbI3 layers cover the substrates with a well crystalized tetragonal phase of CH3NH3PbI3. Moreover, the passivation of the TiO2 layer by PCBM plays an important role for high-performance perovskite solar cells. The EDX mapping for the carbon distribution confirmed that a passivation of the TiO2 layer is successfully generated. Devices composed of evaporated CH3NH3PbI3 and a double layer of TiO2/PCBM are able to achieve high stabilized PCEs of over 16%. Moreover, conformal perovskite layers were successfully deposited homogeneously on top of textured silicon with full surface coverage. This constitutes an important step towards the preparation of high efficiency silicon-perovskite tandem devices on textured silicon [4].