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 SM ISO690:2012СЕНОКОСОВ, Эдуард, ЖДАНОВ, А., ЧУКИТА, В.. Управление технологическими режимами выращивания полупроводниковых слоев в квазизамкнутом объеме. In: Telecommunications, Electronics and Informatics, Ed. 6, 24-27 mai 2018, Chișinău. Chișinău, Republica Moldova: 2018, Ed. 6, pp. 501-502. ISBN 978-9975-45-540-4. |
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| Telecommunications, Electronics and Informatics Ed. 6, 2018 |
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Conferința "Telecommunications, Electronics and Informatics" 6, Chișinău, Moldova, 24-27 mai 2018 | ||||||
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A device has been developed that allows to automatically control the technological process of growing semiconductor layers and to obtain layers with controlled physical parameters. |
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| Cuvinte-cheie the technological process, semiconductor layers, physical parameters |
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