Effect of carrier gas and vacuum annealing on the physical properties of ZnO thin films doped with gallium by chemical spray pyrolysis
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POTLOG, Tamara, LUNGU, Ion, BOTNARIUC, Vasile, RAEVSKY, Simion, WORASAWAT, Suchada, MIMURA, Hidenori, GORCEAC, Leonid. Effect of carrier gas and vacuum annealing on the physical properties of ZnO thin films doped with gallium by chemical spray pyrolysis. In: Telecommunications, Electronics and Informatics, Ed. 6, 24-27 mai 2018, Chișinău. Chișinău, Republica Moldova: 2018, Ed. 6, pp. 145-149. ISBN 978-9975-45-540-4.
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Telecommunications, Electronics and Informatics
Ed. 6, 2018
Conferința "Telecommunications, Electronics and Informatics"
6, Chișinău, Moldova, 24-27 mai 2018

Effect of carrier gas and vacuum annealing on the physical properties of ZnO thin films doped with gallium by chemical spray pyrolysis


Pag. 145-149

Potlog Tamara1, Lungu Ion1, Botnariuc Vasile1, Raevsky Simion1, Worasawat Suchada2, Mimura Hidenori2, Gorceac Leonid1
 
1 Moldova State University,
2 Research Institute of Electronics, Shizuoka University
 
Disponibil în IBN: 29 mai 2018


Rezumat

Structural, optical and electrical properties of zinc oxide thin films doped with 2% Ga, annealed in the vacuum at the same temperature and obtained onto glass substrates by the chemical spray pyrolysis method in the different gas atmospheres were investigated by X-ray Diffraction (XRD), UV-VIS spectrophotometry and Hall measurements, respectively. XRD studies revealed that all films were polycrystalline in nature, with a hexagonal wurtzite crystal structure and a predominant (002) c-axis orientation. All ZnO:Ga thin films had higher than 80 % transmittances in the visible region. Doping with 2% Ga led to a decrease in the optical band gap indifferent of the nature of the carrier gas. The synthesis of ZnO thin films with 2% Ga doping and annealing in the same conditions in Ar and O2 atmospheres led to the lower conductivity with electron concentration of 1016 cm−3.

Cuvinte-cheie
ZnO thin films, carrier gas,

spray pyrolysis, optical properties, electrical parameters