Superconducting hybrids based on thin films are the object for intense investigations for recent decades as a base element for superconducting electronics [1]. The investigations of proximity effect at Superconductor-Normal metal (S/N) and Superconductor-Ferromagnet (S/F) interfaces require technological approach yields high quality superconducting films with constant thicknesses and enhanced superconducting properties. We developed technological approach yields significant improvement of preparation of SF hybrids, based on the most promising for superconducting spintronics applications materials - Nb and ferromagnetic alloy CuNi. of nanoscale thickness, in comparison with common methods based on DCmagnetron deposition. There is a very important to gain knowledge about intrinsic properties of the layers. In this work we present results of High Resolution Transmission electron Microscopy (HRTEM) of CuNi/Nb/CuNi samples prepared by the procedure described in [2]. Figure 1 demonstrates the cross section analysis of one of the samples on the atomic scale. The interface area, marked in the imagem, a Fast fourier Transformation was performed and a diffraction pattern obtained. The diffraction points were masked with the help of a computer program and the background noise substracted. An Inverse Fourier Transformation of the diffraction pattern gives more detailed view on the microstructure of the interface which is shown in Figure 2. One can clearly see the regular crystal structure of the BCC Niobium and FCC lattice structure of Copper Nickel layer and a very sharp and clean interface between the two layers in the area near the red arrow, which show the presence of a dislocation at the interface.figureFig 1a: HRTEM images of the cross section of Nb/CuNi sample on the silicon substrate. Figure 1b) is a result of a Fourier and inverse Fourier Transformation