Conţinutul numărului revistei |
Articolul precedent |
Articolul urmator |
690 18 |
Ultima descărcare din IBN: 2023-11-03 06:44 |
Căutarea după subiecte similare conform CZU |
681.586 (8) |
Mecanisme și instrumente de precizie. Mecanică de precizie. Mecanică fină (79) |
SM ISO690:2012 ABABII, Nicolai, TROFIM, Viorel, LUPAN, Oleg. Microheaters for copper oxide-based gas sensors. In: Journal of Engineering Sciences, 2020, vol. 27, nr. 2, pp. 52-61. ISSN 2587-3474. DOI: https://doi.org/10.5281/zenodo.3784343 |
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Journal of Engineering Sciences | ||||||
Volumul 27, Numărul 2 / 2020 / ISSN 2587-3474 /ISSNe 2587-3482 | ||||||
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DOI:https://doi.org/10.5281/zenodo.3784343 | ||||||
CZU: 681.586 | ||||||
Pag. 52-61 | ||||||
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Rezumat | ||||||
This paper describes two procedures developed for obtaining microheaters for copper oxide-based gas sensors. Different types of substrates (glass, SiO2/Si and ceramic) are investigated, as well as different configurations of geometric parameters for meandering heating elements. It is shown that microheaters made on glass, ceramic and SiO2/Si substrates can survive up to a temperature of -400 °C, which allows their integration for applications in gas sensing devices to maintain necessary operating temperature. |
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Cuvinte-cheie microheater, Copper oxide, gas sensors, glass substrate, Semiconductors, microîncălzitor, oxid de cupru, senzori de gaz, substrat de sticlă, semiconductori |
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