Towards uniform electrochemical porosification of bulk HVPE-grown GaN
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MONAICO, Eduard, MOISE, Calin, MIHAI, G., URSACHI, Veaceslav, LEISTNER, Karin, TIGINYANU, Ion, ENACHESCU, Marius, NIELSCH, Kornelius. Towards uniform electrochemical porosification of bulk HVPE-grown GaN. In: Journal of the Electrochemical Society, 2019, vol. 166, pp. H3159-H3166. ISSN 0013-4651. DOI: https://doi.org/10.1149/2.0251905jes
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Journal of the Electrochemical Society
Volumul 166 / 2019 / ISSN 0013-4651

Towards uniform electrochemical porosification of bulk HVPE-grown GaN

DOI:https://doi.org/10.1149/2.0251905jes

Pag. H3159-H3166

Monaico Eduard1, Moise Calin2, Mihai G.2, Ursachi Veaceslav3, Leistner Karin4, Tiginyanu Ion1, Enachescu Marius2, Nielsch Kornelius45
 
1 Technical University of Moldova,
2 University Politehnica of Bucharest,
3 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu",
4 Leibniz Institute for Solid State and Materials Reseach, Dresden,
5 Technische Universitat Dresden, Dresden
 
 
Disponibil în IBN: 29 martie 2019


Rezumat

In this paper, we report on results of a systematic study of porous morphologies obtained using anodization of HVPE-grown crystalline GaN wafers in HNO 3 , HCl, and NaCl solutions. The anodization-induced nanostructuring is found to proceed in different ways on N-and Ga-faces of polar GaN substrates. Complex pyramidal structures are disclosed and shown to be composed of regions with the degree of porosity modulated along the pyramid surface. Depending on the electrolyte and applied anodization voltage, formation of arrays of pores or nanowires has been evidenced near the N-face of the wafer. By adjusting the anodization voltage, we demonstrate that both current-line oriented pores and crystallographic pores are generated. In contrast to this, porosification of the Ga-face proceeds from some imperfections on the surface and develops in depth up to 50 μm, producing porous matrices with pores oriented perpendicularly to the wafer surface, the thickness of the pore walls being controlled by the applied voltage. The observed peculiarities are explained by different values of the electrical conductivity of the material near the two wafer surfaces.

Cuvinte-cheie
Electrolytes, III-V semiconductors, Sodium chloride