There are a variety of applications for devices that extend into the deep-UV, including biological agent detection and optical storage. The nitride material system is a set of semiconducting compounds that have wavelengths that span a broad range, from yellow to deepUV. AlGaN has a direct bandgap that extends into the deep-UV range; the device-quality material, is deposited epitaxially using metalorganic chemical vapor deposition on sapphire substrates.