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SM ISO690:2012 LANGA, Sergiu, FREY, Stefan, CARSTENSEN, Juergen, FOLL, Helmut, TIGINYANU, Ion, HERMANN, Martin, BOTTGER, Gunnar. Waveguide structures based on porous indium phosphide. In: Electrochemical and Solid-State Letters, 2005, vol. 8, pp. 30-32. ISSN 1099-0062. DOI: https://doi.org/10.1149/1.1847683 |
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Electrochemical and Solid-State Letters | |
Volumul 8 / 2005 / ISSN 1099-0062 | |
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DOI: https://doi.org/10.1149/1.1847683 | |
Pag. 30-32 | |
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Rezumat | |
We researched the possibilities for engineering the morphology of porous structures in n-InP. Lithographic patterning of the sample surface before anodic etching was shown to modify considerably the electric field distribution which, in its turn, defined the direction of pore growth inside the specimen. We show that local formation of the nucleation layer combined with the possibility to introduce current-line oriented pores in a controlled manner represents a promising tool for manufacturing waveguide structures based on porous InP. Some results on simulation of the properties of these structures are presented. |
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Cuvinte-cheie Electric potential, etching, finite difference method, porous materials, scanning electron microscopy, Substrates, Waveguides, Time domain analysis |
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