Influence of TiO2 Ultra-Thin Films on Gas Sensing Properties of CuO:Zn
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2024-04-19 22:54
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ABABII, Nicolai, REIMER, Tim, POSTICA, Vasile, HOPPE, Mathias, CHEMNITZ, Steffen, SHONTYA, Viktor, BENECKE, Wolfgang, ADELUNG, Rainer, LUPAN, Oleg. Influence of TiO2 Ultra-Thin Films on Gas Sensing Properties of CuO:Zn. In: Microelectronics and Computer Science, Ed. 9, 19-21 octombrie 2017, Chisinau. Chișinău, Republica Moldova: Universitatea Tehnică a Moldovei, 2017, Ediția 9, pp. 33-34. ISBN 978-9975-4264-8-0.
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Microelectronics and Computer Science
Ediția 9, 2017
Conferința "Microelectronics and Computer Science"
9, Chisinau, Moldova, 19-21 octombrie 2017

Influence of TiO2 Ultra-Thin Films on Gas Sensing Properties of CuO:Zn

Pag. 33-34

Ababii Nicolai1, Reimer Tim2, Postica Vasile1, Hoppe Mathias3, Chemnitz Steffen2, Shontya Viktor1, Benecke Wolfgang2, Adelung Rainer3, Lupan Oleg1
 
1 Technical University of Moldova,
2 Fraunhofer Institute for Silicon Technologies (ISIT),
3 Institute for Material Science, Christian-Albrechts-University of Kiel
 
 
Disponibil în IBN: 22 octombrie 2017


Rezumat

Copper oxide is  a  p type metal oxide with remarkable optical, electrical, thermal and sensing  properties.  The oxidation of Cu 2 O to CuO can be performed by  thermal annealing a t relatively low  temperatures. The present study reports on  the  gas sensing properties of the CuO: Zn  nano crystalline  films  synthesized via a simple  synthesis  from  chemical  solutions  (SCS)  covered with a ultra thin layer of TiO 2 . The  TiO 2  ultra thin films  were deposited via the atomic layer deposition (ALD).  The gas sensing properties  (selectivity, response and recovery times and gas response) were investigated in dependence of  the  operating  temperature.   

Cuvinte-cheie
CuO, TiO2,

gas sensor, films, hydrogen, ALD