The results of studying the effect of loading under the low-temperature action of oxygen plasma on the surface of Italian fabric of polyethylene terephthalate monofilament threads are presented. Gravimetric and mass-spectrum techniques (mass spectrometer IPDO-2A) were used in this work. When the contact times of the plasma with the sample are less than the characteristic times of chemical reactions, the contact time determines the specific rates of heterogeneous processes. The reciprocal influence of eterogeneous and volumetric processes only becomes appreciable when the contact times of the plasma with the sample exceed the characteristic times of chemical reactions. As a result, the specific rates of etching, of oxygen consumption from the gas phase, and of the formation of gaseous products decrease with the increase in the reactor load ratio; however, the correlation of the destruction channels does not change. Compared to the air plasma, oxygen plasma was found to be more stable to the loading effect in a wide range of discharge parameters.