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 SM ISO690:2012SAMOTAEV, Nikolay, OBLOV, Konstntin, IVANOVA, Anastasia, GORSHKOVA, Anastasiya, PODLEPETSKY, Boris. Efficiency evaluation of ceramic mems device manufactured by laser micromilling. In: Electronics, Communications and Computing, Ed. 10, 23-26 octombrie 2019, Chişinău. Chișinău, Republica Moldova: 2019, Editia 10, p. 59. ISBN 978-9975-108-84-3. |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
| Electronics, Communications and Computing Editia 10, 2019 |
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Conferința "Electronics, Communications and Computing" 10, Chişinău, Moldova, 23-26 octombrie 2019 | ||||||
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| Pag. 59-59 | ||||||
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This work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception. |
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| Cuvinte-cheie gas sensor, MEMS, SMD-package, 3D-printing |
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