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SM ISO690:2012 GHIMPU, Lidia, LUPAN, Oleg, POPESCU, Liliana, TIGINYANU, Ion. Nanoporous zinc oxide films prepared by magnetron sputtering. In: Nanotechnologies and Biomedical Engineering, Ed. 1, 7-8 iulie 2011, Chișinău. Technical University of Moldova, 2011, Editia 1, pp. 138-141. ISBN 978-9975-66-239-0.. |
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Nanotechnologies and Biomedical Engineering Editia 1, 2011 |
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Conferința "International Conference on Nanotechnologies and Biomedical Engineering" 1, Chișinău, Moldova, 7-8 iulie 2011 | ||||||
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Pag. 138-141 | ||||||
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In this paper we demonstrate an inexpensive approach for the fabrication of nanoporous zinc oxide films by using magnetron sputtering. Study of the structural properties proves the crystallographic perfection of porous nanostructures and the possibility of its controlling by adjusting the technological parameters in the growth process. The XRD pattern of nanoporous ZnO films exhibits high intensity of the peaks relative to the background signal which is indicative of the ZnO hexagonal phase and a good crystallinity of the samples grown by magnetron sputtering. |
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Cuvinte-cheie ZnO, nanoporous, films, magnetron sputtering |
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