Vanadium dioxide (VO2) is considering as the most promised thermochromic material for energy-efficient windows due to the closest to a room temperature metal-insulator transition (MIT) in comparison with the rest of switchable materials [1]. For synthesis of VO2 thin films we utilize method of metalorganic aerosol deposition (MAD), which is a variation of aerosol assisted chemical vapor deposition that offers a technique for a real thermochromic windows fabrication owing to its low-cost and scalability. The principal technological challenges, which have to be overcomed with MAD, are consisted in avoiding formation of the others vanadium oxide phases (e.g vanadium pentoxide) possessed an oxidation degree different from 4 as well as in preventing nucleation of polymorphs deviated from the required monoclinic VO2 phase. The best solution to identify the vanadium oxide phases and to examine the MIT is the Raman spectroscopy. This method is very sensitive both to lattice distortions induced by strains and to a little symmetry change between the related polymorphs. Moreover, the phase separation and coupling on the micrometer scale in polycrystalline thin films can be evaluated with Raman microscopy [2]. Raman spectroscopy allows us to optimize growth conditions for formation of a pure monoclinic VO2 phase and study hysteresis behavior around the MIT. Thin polycrystalline VO2 films were grown on amorphous SiO2/Si(111) substrates. Temperature-controlled Raman spectroscopy was acquired using Bruker Innova-IRIS (Integrated AFM-Raman Imaging System). The observed four sharp peaks at 196 cm-1, 225 cm-1, 313 cm-1, and 390 cm-1 on Raman spectrum (300K) of 80 nm thick VO2 represent Ag vibration modes of the monoclinic VO2. These four characteristic Raman peaks disappears above 350K, indicating thus that during the MIT VO2 undergoes a structural phase transition from a low-temperature monoclinic phase to a high temperature tetragonal phase. For further study of two-component VO2–based nanocomposite films we also intend to apply Raman spectroscopy and microscopy, especially in the cases of a large amount of insulating second phase that completely prevents measuring conductivity to evaluate the MIT characteristics.