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SM ISO690:2012 ХОЛОДКОВ, И.. Энергетическое распределение ионов в прикатодных областях тлеющего разряда в смеси O2 + Ar. In: Электронная обработка материалов, 2009, nr. 5(45), pp. 44-47. ISSN 0013-5739. |
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Электронная обработка материалов | |||||
Numărul 5(45) / 2009 / ISSN 0013-5739 /ISSNe 2345-1718 | |||||
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Pag. 44-47 | |||||
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The results of investigation of ion energy distribution in cathode region of direct current discharge in O2 Ar (0–100%) mixture are presented at different plasma parameters (1-3 Pa pressure, 10–30 mA discharge current). It is shown that Ar percentage more than 20% results to ion of Ar2 formation and shifting distribution maximum to higher energies. |
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