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Articolul precedent |
Articolul urmator |
844 10 |
Ultima descărcare din IBN: 2023-02-07 10:35 |
Căutarea după subiecte similare conform CZU |
378.147:621.3 (2) |
Învățământ superior. Universități. Cursuri universitare (2533) |
Electrotehnică (1146) |
SM ISO690:2012 ADASCALIŢEI, Adrian A., SECRIERU, Nicolae, TODOS, Petru. Technology enhanced electrical engineering education in context of Crunt Tempus project. In: Meridian Ingineresc, 2016, nr. 2(61), pp. 18-21. ISSN 1683-853X. |
EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
Meridian Ingineresc | |||||||
Numărul 2(61) / 2016 / ISSN 1683-853X | |||||||
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CZU: 378.147:621.3 | |||||||
Pag. 18-21 | |||||||
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As MEMS technology is implemented in a growing range of areas, the reliability of MEMS devices is a concern. Understanding the failure mechanisms is a prerequisite for quantifying and improving the reliability of MEMS devices. This paper reviews the common failure mechanisms in MEMS and highlights some of the reliability concerns for both ohmic and capacitive MEMS switches. Ohmic switches fail catastrophically by stiction whereas dielectric charging leads to degraded performance of capacitive switches. |
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