Nanoindentation response of semiconductors
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2020-10-14 15:54
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LEBOURHIS, E., PATRIARCHE, G.. Nanoindentation response of semiconductors. In: Moldavian Journal of the Physical Sciences, 2008, nr. 4(7), pp. 456-465. ISSN 1810-648X.
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Moldavian Journal of the Physical Sciences
Numărul 4(7) / 2008 / ISSN 1810-648X /ISSNe 2537-6365

Nanoindentation response of semiconductors

Pag. 456-465

LeBourhis E.1, Patriarche G.2
 
1 Université de Poitiers,
2 CNRS - Centre National de la Recherche Scientifique, Laboratoire de Photonique et de Nanostructures
 
 
Disponibil în IBN: 14 decembrie 2013


Rezumat

The paper reviews the nanoindentation behaviour of semiconductors under concentrated load. We consider first, fundamental aspects regarding the mechanical resistance to contact loading of semiconductor single crystals (indentation strain, hardness-yield stress relationship). Then, the paper summarizes recent studies regarding nanoindentation structure and geometrical size effect.