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 SM ISO690:2012HAREA, Evghenii. Indentation size effect in ITO/Si planar structure under concentrated load action. In: Moldavian Journal of the Physical Sciences, 2007, nr. 2(6), pp. 228-232. ISSN 1810-648X. |
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| Moldavian Journal of the Physical Sciences | ||||||
| Numărul 2(6) / 2007 / ISSN 1810-648X /ISSNe 2537-6365 | ||||||
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| Pag. 228-232 | ||||||
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For studying strength properties of planar structures ITO (In2O3·SnO2)/Si the technique
of Vickers pyramid microindentation for the load range of 0.2-1.5 N was applied. Measure-
ments of microhardness of these structures have shown results varying over a wide range in
dependence on film thickness and applied load, this can be explained by the size effect presence. In addition to well known factors causing the size effect, another explanation being
characteristic of film structures is proposed. |
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