This paper analyzes the effect of chlorine treatment on the structure and resistance of CdTe layers. The morphology, chemical composition, and structure were studied using scanning electron microscopy (SEM), energy dispersive X-ray analysis (EDX), and X-ray diffraction (XRD). Both non-activated and activated CdTe layers are polycrystalline with an average grain size being three times higher after chlorine activation and thermal treatment. All CdTe thin layers regardless of the treatment temperature have a cubic crystal structure.