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 SM ISO690:2012ГОЛОСОВ, Д., СВАДКОВСКИЙ, С., ЗАВАДСКИЙ, С.. Исследование характеристик магнетронных распылительных систем несбалансированного типа. In: Электронная обработка материалов, 2002, nr. 6(38), pp. 66-74. ISSN 0013-5739. |
| EXPORT metadate: Google Scholar Crossref CERIF DataCite Dublin Core |
 Электронная обработка материалов |
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| Numărul 6(38) / 2002 / ISSN 0013-5739 /ISSNe 2345-1718 | ||||||
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| Pag. 66-74 | ||||||
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The results of comparative analysis of four configurations of planar magnetron sputtering systems characteristics are introduced. The studies of features of constructing of magnet systems of a magnetrons unbalanced type are carried out. The regularities of influencing of discharge characteristics on parameters of energetic particles fluxes on a substrate are established. |
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