Закономерности формообразования поверхности при бесконтактном химико-механическом полировании пластин
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ГРИГОРЬЕВ, Н., КРАВЕЦКИЙ, М., ПАЩЕНКО, Г., СЫПКО, С., ФОМИН, А.. Закономерности формообразования поверхности при бесконтактном химико-механическом полировании пластин. In: Электронная обработка материалов, 2002, nr. 6(38), pp. 12-17. ISSN 0013-5739.
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Электронная обработка материалов
Numărul 6(38) / 2002 / ISSN 0013-5739 /ISSNe 2345-1718

Закономерности формообразования поверхности при бесконтактном химико-механическом полировании пластин


Pag. 12-17

Григорьев Н., Кравецкий М., Пащенко Г., Сыпко С., Фомин А.
 
Институт физики полупроводников им. В. Е. Лашкарева НАНУ
 
Disponibil în IBN: 24 mai 2023


Rezumat

A technological experiment is proposed to establish physical and chemical processes providing chemical hydrodynamic non-contact polishing crystal surface. To describe the processes a balance equation of diffusion, convective and active components of etching fluxes is used. An analytical expression of a relationship between a shape of the surface of the treated material and physical parameters of the processes is obtained. It was established that a macrorelief of the treated surface depends only on a speed of relative moving of the pad and a treated specimen, a distance between the pad and the specimen and a diffusion coefficient of active component in etching solution. Therefore, the shape of the treated surface does not depend on the treated material concentration of active components and a constant of chemical reaction. A good agreement the calculated processes and experimental ones was achieved