Photocatalytic applications of doped zinc oxide porous films grown by magnetron sputtering

Ghimpu Lidia; Reimer Tim; Smazna Daria; Hoppe Mathias; Benecke Wolfgang; Bejenari A.; Cojocaru Ala; Lupan Oleg; Adelung Rainer; Tiginyanu Ion

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GHIMPU, Lidia, REIMER, Tim, SMAZNA, Daria, HOPPE, Mathias, BENECKE, Wolfgang, BEJENARI, A., COJOCARU, Ala, LUPAN, Oleg, ADELUNG, Rainer, TIGINYANU, Ion. Photocatalytic applications of doped zinc oxide porous films grown by magnetron sputtering. In: IFMBE Proceedings: 3rd International Conference on Nanotechnologies and Biomedical Engineering, ICNBME 2015, Ed. 3, 23-26 septembrie 2015, Chişinău. Springer, 2016, Editia 3, Vol.55, pp. 353-356. ISBN 978-981287735-2. ISSN 16800737. DOI: https://doi.org/10.1007/978-981-287-736-9_85

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IFMBE Proceedings
Editia 3, Vol.55, 2016

Conferința "International Conference on Nanotechnologies and Biomedical Engineering"
3, Chişinău, Moldova, 23-26 septembrie 2015

Photocatalytic applications of doped zinc oxide porous films grown by magnetron sputtering

DOI:https://doi.org/10.1007/978-981-287-736-9_85

Pag. 353-356

Ghimpu Lidia¹, Reimer Tim²³⁴, Smazna Daria², Hoppe Mathias², Benecke Wolfgang⁴, Bejenari A.¹, Cojocaru Ala², Lupan Oleg²⁵, Adelung Rainer², Tiginyanu Ion¹⁵

¹ Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu" of the Academy of Sciences of Moldova,
² Institute for Material Science, Christian-Albrechts-University of Kiel,
³ Institute for Electrical Engineering University of Kiel,
⁴ Fraunhofer Institute for Silicon Technologies (ISIT),
⁵ Technical University of Moldova

Disponibil în IBN: 16 august 2022

Rezumat

Undoped, Al-doped and Sn-doped ZnO was sputter-deposited on glass substrates and on trenched Si substrates and some properties of these samples were evaluated. It was shown that the photocatalytic performance of the thin layers is improved by doping with Sn and Al. The samples doped with Al-doping provided a more pronounced effect compared to the control sample, as well as compared to the greater volume of undoped ZnO deposited on Si substrates. Morphology of produced particles was studied using transmission electron microscopy. Electron diffraction patterns were taken to confirm lattice parameters of the materials. Size and shape variations were monitored for un-doped, Al-doped and Sn-doped ZnO. EDX spectroscopy was utilized to assay chemical composition for doped and un-doped samples.

Cuvinte-cheie
Al-ZnO, magnetron sputtering, Nanostructure, Photocatalys, Sn-ZnO, TEM, ZnO

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