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SM ISO690:2012 MORARI, Vadim, URSACHI, Veaceslav, RUSU, Emil, TIGINYANU, Ion. Injection photodiodes based on metal oxide semiconductors. In: Moldavian Journal of the Physical Sciences, 2020, nr. 1-2(19), pp. 98-109. ISSN 1810-648X. DOI: https://doi.org/10.5281/zenodo.4118693 |
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Moldavian Journal of the Physical Sciences | |||||||
Numărul 1-2(19) / 2020 / ISSN 1810-648X /ISSNe 2537-6365 | |||||||
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DOI:https://doi.org/10.5281/zenodo.4118693 | |||||||
CZU: 538.8+539.2+621.382 | |||||||
Pag. 98-109 | |||||||
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A brief review of our recent research on injection photodiodes based on metal oxide semiconductors deposited onto Si substrates is presented. A series of ZnSnO, NiO, and Zn1-xMgxO thin films are prepared by aerosol spray pyrolysis deposition or sol–gel spin coating on Si substrates with a post-deposition thermal treatment in air at a temperature of 5000C. The morphology of films is studied by scanning electron microscopy and atomic force microscopy, while their elemental composition and crystal structure are determined from energy dispersive X-ray (EDAX) and X-ray diffraction (XRD) analysis, respectively. It is shown that the produced n-ZnSnO/p-Si, n-ZnMgO/p-Si, and p-NiO/n-Si heterojunctions operate as injection photodiodes at a forward bias. |
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Cuvinte-cheie thin films, aerosol spray pyrolysis, sol–gel spin coating, injection photodiodes, Filme subțiri, piroliză cu aerosoli, metoda sol-gel, centrifugare, fotodiode cu injecție |
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