Sensitivity evaluation of the nanostructure-enhanced BAW mass sensor
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ZAZERIN, A., ULIANOVA, V., BOGDAN, Olexandr, ORLOV, Anatolii. Sensitivity evaluation of the nanostructure-enhanced BAW mass sensor. In: Nanotechnologies and Biomedical Engineering, Ed. 3, 23-26 septembrie 2015, Chișinău. Springer, 2015, Editia 3, p. 97.
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Nanotechnologies and Biomedical Engineering
Editia 3, 2015
Conferința "International Conference on Nanotechnologies and Biomedical Engineering"
3, Chișinău, Moldova, 23-26 septembrie 2015

Sensitivity evaluation of the nanostructure-enhanced BAW mass sensor


Pag. 97-97

Zazerin A., Ulianova V., Bogdan Olexandr, Orlov Anatolii
 
National Technical University of Ukraine "Igor Sikorsky Kyiv Polytechnic Institute"
 
Disponibil în IBN: 13 aprilie 2019


Rezumat

The general implementation concept of the mass sensor based on membrane bulk acoustic wave resonator with nanostructured sensing layer was presented. The 3-dimensional finite element model of the thin film bulk acoustic wave resonator was built to estimate its sensitivity. It was shown that application of the nanostructured ZnO with large effective surface area provided the 20 times sensitivity increase over the polycrystalline sensing layer. The performance characteristics of the proposed sensor at the appointed conditions were described in details.