The microwave properties of tin sulfide thin films prepared by RF magnetron sputtering techniques
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DRAGOMAN, Mircea L., ALDRIGO, Martino, DINESCU, Adrian, IORDANESCU, Sergiu A., ROMANIȚAN, Cosmin, VULPE, Silviu, DRAGOMAN, Daniela, BRANISTE, Tudor, SUMAN, Victor, RUSU, Emil, TIGINYANU, Ion. The microwave properties of tin sulfide thin films prepared by RF magnetron sputtering techniques. In: Nanotechnology, 2022, vol. 33, pp. 1-8. ISSN 0957-4484. DOI: https://doi.org/10.1088/1361-6528/ac59e3
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Nanotechnology
Volumul 33 / 2022 / ISSN 0957-4484

The microwave properties of tin sulfide thin films prepared by RF magnetron sputtering techniques

DOI:https://doi.org/10.1088/1361-6528/ac59e3

Pag. 1-8

Dragoman Mircea L.1, Aldrigo Martino1, Dinescu Adrian1, Iordanescu Sergiu A.1, Romanițan Cosmin1, Vulpe Silviu1, Dragoman Daniela23, Braniste Tudor4, Suman Victor5, Rusu Emil5, Tiginyanu Ion6
 
1 National Institute for Research and Development in Microtechnology, IMT-Bucharest,
2 University of Bucharest,
3 Romanian Academy of Science,
4 Technical University of Moldova,
5 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu",
6 Academy of Sciences of Moldova
 
 
Disponibil în IBN: 15 aprilie 2022


Rezumat

In this paper we present the microwave properties of tin sulfide (SnS) thin films with the thickness of just 10 nm, grown by RF magnetron sputtering techniques on a 4 inch silicon dioxide/high-resistivity silicon wafer. In this respect, interdigitated capacitors in coplanar waveguide technology were fabricated directly on the SnS film to be used as both phase shifters and detectors, depending on the ferroelectric or semiconductor behaviour of the SnS material. The ferroelectricity of the semiconducting thin layer manifests itself in a strong dependence of the electrical permittivity on the applied DC bias voltage, which induces a phase shift of 30 degrees mm-1 at 1 GHz and of 8 degrees mm-1 at 10 GHz, whereas the transmission losses are less than 2 dB in the frequency range 2-20 GHz. We have also investigated the microwave detection properties of SnS, obtaining at 1 GHz a voltage responsivity of about 30 mV mW-1 in the unbiased case and with an input power level of only 16 μW. 

Cuvinte-cheie
detector, ferroelectrics, microwaves, phase shifter, Semiconductors, thin films, tin sulfide