Influence of the growth temperature on the properties of the transparent and conductive NiO thin films obtained by RF magnetron sputtering
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GHIMPU, Lidia, SUMAN, Victor, RUSNAC, Dumitru. Influence of the growth temperature on the properties of the transparent and conductive NiO thin films obtained by RF magnetron sputtering. In: IFMBE Proceedings: . 4th International Conference on Nanotechnologies and Biomedical Engineering, Ed. 4, 18-21 septembrie 2019, Chişinău. Switzerland: Springer Nature Switzerland AG, 2020, Ediția 4, Vol.77, pp. 291-295. ISBN 978-303031865-9. ISSN 16800737. DOI: https://doi.org/10.1007/978-3-030-31866-6_57
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IFMBE Proceedings
Ediția 4, Vol.77, 2020
Conferința "Conference on Nanotechnologies and Biomedical Engineering"
4, Chişinău, Moldova, 18-21 septembrie 2019

Influence of the growth temperature on the properties of the transparent and conductive NiO thin films obtained by RF magnetron sputtering

DOI:https://doi.org/10.1007/978-3-030-31866-6_57

Pag. 291-295

Ghimpu Lidia1, Suman Victor1, Rusnac Dumitru2
 
1 Institute of the Electronic Engineering and Nanotechnologies "D. Ghitu",
2 Moldova State University
 
Proiecte:
 
Disponibil în IBN: 27 octombrie 2020


Rezumat

Transparent and conductive nickel oxide (NiO) thin films were deposited on the glass supports by magnetron pulverization (RF). The NiO thin films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), SEM equipped with X-ray detector-analyzer (EDX), UV-VIS spectroscopy and Hall measurements. XRD revealed that the NiO thin films obtained at different substrate temperatures are textured and possess a cubic crystalline structure. SEM analysis indicates the formation of the crystallites with a granular structure. The EDX spectra of the NiO thin films highlighted the presence of Ni and O as elementary components. With the increase of the substrate temperature from 50 to 450 °C Hall measurements show a decrease of the resistivity of the NiO thin layers due to the increase of the concentration and mobility of the free carriers.

Cuvinte-cheie
EDX analysis, Electrical properties, NiO thin films, RF magnetron pulverization, UV spectroscopy, XRD diffraction